Sr. Process Engineer, Implant, Terafab

Terafab is building a vertically integrated semiconductor factory at an unprecedented scale. The facility brings logic, memory, packaging, test, and lithography mask production under one roof, optimized for rapid iteration and maximum compute density per square foot.

Process engineering is the discipline that turns Terafab technology into reality, atom by atom. This role owns ion implantation processes across three distinct chip families: edge-inference processors, space-hardened data center AI chips for orbital satellites, and high-bandwidth memory. The engineer will develop and optimize dopant implantation, profile control, and stress engineering while balancing junction performance, thermal budget compatibility, defectivity, and integration constraints across radically different product requirements.

This is a highly hands-on role requiring deep expertise in ion implantation while collaborating closely with diffusion/anneal, thin films, etch, CMP, metallization, photo, metrology, and integration teams in one of the most ambitious fab programs in the world.

• Develop and qualify high-current, medium-current, and low-energy ion implantation processes at 2nm and beyond, including source/drain, substrate, channel, well, and halo implants for logic and memory devices
• Optimize critical implant parameters: dopant species, energy, dose, tilt, rotation, beam current, and damage engineering to achieve precise junction profiles, sheet resistance, and leakage performance
• Own ion implant processes end-to-end: from tool installation and qualification through recipe development, beam setup optimization, particle and metal contamination control, and HVM handoff
• Qualify implant tools from installation to production readiness, including beam calibration, uniformity, angle control, wafer charging management, and chamber matching
• Analyze implant process, dopant distribution, and device performance using first-principles, physics-based approaches to understand implantation mechanisms, amorphization, channeling, and transient enhanced diffusion (TED) interactions
• Lead root cause analysis for profile shifts, device param variation, and yield issues; establish inline metrology and SPC control strategies; and drive systematic yield improvement
• Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues
• Drive development of next-generation implantation techniques, including plasma doping (PLAD) and advanced damage/activation strategies for sub-2nm nodes and specialized applications

• Degree in Chemical Engineering, Materials Science, Electrical Engineering, Physics, or equivalent experience
• 5+ years of hands-on ion implantation process and integration engineering experience in a semiconductor fab, with strong focus on sub-7nm logic or memory technologies
• Deep expertise in ion implanters from Applied Materials (VIISta) or equivalent platforms
• Proven track record establishing Process of Record (POR) for critical implant steps at advanced nodes
• Proficiency with implant metrology including SIMS, sheet resistance (Rs), Therma-Probe, XRD, TEM, and electrical characterization
• Strong DOE skills and statistical analysis capability (JMP, Python, or R)
• Excellent collaboration skills with the ability to work proactively across diffusion/anneal, thin films, integration, and equipment engineering teams
• Passion for ambitious, vertically integrated semiconductor programs and building high-performance compute technologies

Along with competitive pay, as a full-time Tesla employee, you are eligible for the following benefits at day 1 of hire:

• Medical plans > plan options with $0 payroll deduction
• Family-building, fertility, adoption and surrogacy benefits
• Dental (including orthodontic coverage) and vision plans, both have options with a $0 paycheck contribution
• Company Paid (Health Savings Accounts) HSA Contribution when enrolled in the High-Deductible medical plan with HSA
• Healthcare and Dependent Care Flexible Spending Accounts (FSA)
• 401(k) with employer match, Employee Stock Purchase Plans, and other financial benefits
• Company paid Basic Life, AD&D
• Short-term and long-term disability insurance (90 day waiting period)
• Employee Assistance Program
• Sick and Vacation time (Flex time for salary positions, Accrued hours for Hourly positions), and Paid Holidays
• Back-up childcare and parenting support resources
• Voluntary benefits to include: critical illness, hospital indemnity, accident insurance, theft & legal services, and pet insurance
• Weight Loss and Tobacco Cessation Programs
• Tesla Babies program
• Commuter benefits
• Employee discounts and perks program