Sr. Process Engineer, Epitaxy, Terafab

We are building Terafab, a vertically integrated semiconductor factory at an unprecedented scale. The facility houses logic, memory, packaging, test, and lithography mask production under one roof, optimized for rapid iteration and maximum compute density per square foot.

Process engineering is where the discipline by which Terafab technology gets built, atom by atom, and dielectric films set the foundation for device performance. You will develop and own dielectric deposition processes across three distinct chip families: edge-inference processors, space-hardened data center AI chips for orbital satellites, and high-bandwidth memory. You'll optimize mechanical, chemical, and electrical properties of epitaxial thin films including but not limited to crystallinity, defectivity, strain/stress, doping, and contact resistivity while balancing thermal budgets and integration constraints across radically different product requirements.

You should have deep expertise in dielectric deposition, but be ready to work across core process domains such as etch, clean, dielectric thin film, metallization, metrology, and thermal processing and integration engineers as integration evolves. This is a highly hands-on role at one of the most ambitious fab programs in the world.

• Develop and qualify epitaxial CVD processes for nanosheet, channel, and S/D contact at 2nm and beyond nodes.
• Characterize dielectric film properties-stress/strain, crystallinity/growth defect, deposition selectivity, etch rate, doping concentration, and contact resistance.
• Own development for epitaxial films from tool installation and its continuous process/hardware improvement through HVM handoff for optimal productivity and yield
• Qualify deposition tools from installation through production readiness, including chamber matching, particle control, and process window and stability qualification
• Analyze process, property and structure from first principles-based approach to understand cause and effect mechanisms and to optimize key properties, not just recipes
• Lead root cause analysis, establish inline metrology and SPC control strategies, and drive systematic yield improvement
• Support 24/7 manufacturing operations through rotations, on-call availability, and rapid response to critical production issues
• Drive next-generation dielectric materials and process development

• Degree in Chemical Engineering, Materials Science, Electrical Engineering, Physics, or related technical field, or equivalent experience
• 5+ years of hands-on epitaxial process/integration engineering experience in a semiconductor fab, especially <7nm in a logic, memory, or foundry environment
• Deep experience with epitaxial CVD tool qualification (Applied Materials, ASM), epitaxial process development, and process of record (POR) establishment at advanced nodes
• Proficiency with thin films metrology tools: ellipsometry, XRD, XRF, TEM, CV/IV characterization, film stress measurement, and defect inspection
• Strong DOE skills and statistical analysis capability (JMP, Python, or R)
• Ability to work closely and proactively across wet, etch, thin films, integration, and equipment engineering teams

Along with competitive pay, as a full-time Tesla employee, you are eligible for the following benefits at day 1 of hire:

• Medical plans > plan options with $0 payroll deduction
• Family-building, fertility, adoption and surrogacy benefits
• Dental (including orthodontic coverage) and vision plans, both have options with a $0 paycheck contribution
• Company Paid (Health Savings Accounts) HSA Contribution when enrolled in the High-Deductible medical plan with HSA
• Healthcare and Dependent Care Flexible Spending Accounts (FSA)
• 401(k) with employer match, Employee Stock Purchase Plans, and other financial benefits
• Company paid Basic Life, AD&D
• Short-term and long-term disability insurance (90 day waiting period)
• Employee Assistance Program
• Sick and Vacation time (Flex time for salary positions, Accrued hours for Hourly positions), and Paid Holidays
• Back-up childcare and parenting support resources
• Voluntary benefits to include: critical illness, hospital indemnity, accident insurance, theft & legal services, and pet insurance
• Weight Loss and Tobacco Cessation Programs
• Tesla Babies program
• Commuter benefits
• Employee discounts and perks program